The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2016
Filed:
Apr. 18, 2013
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Yuichi Yoshida, Tokyo, JP;
Kousuke Yoshihara, Tokyo, JP;
Assignee:
Tokyo Electron Limited, Minato-Ku, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/67 (2006.01); G03F 7/16 (2006.01); G03F 7/30 (2006.01); G03F 7/32 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02104 (2013.01); G03F 7/162 (2013.01); G03F 7/3021 (2013.01); G03F 7/325 (2013.01); H01L 21/02052 (2013.01); H01L 21/6715 (2013.01); H01L 21/67017 (2013.01); H01L 21/67051 (2013.01);
Abstract
A liquid treatment method includes: supplying a first organic solvent to a substrate with the substrate being held horizontally by a substrate holder; and thereafter supplying a second organic solvent to a substrate held by the substrate holder, the second solvent having a higher cleanliness than the first solvent.
Quick Actions:
Yoshida, Yuichi. (2016). Liquid treatment apparatus and method and non-transitory storage medium (U.S. Patent No. 9293320). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9293320
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile