The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2016
Filed:
Jun. 17, 2013
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Hans-Juergen Rostalski, Oberkochen, DE;
Sascha Migura, Aalen-Unterrombach, DE;
Thomas Schicketanz, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03B 27/72 (2006.01); G02B 5/08 (2006.01); G03F 7/20 (2006.01); G02B 17/06 (2006.01);
U.S. Cl.
CPC ...
G02B 5/0891 (2013.01); G02B 17/0663 (2013.01); G03F 7/70091 (2013.01); G03F 7/70233 (2013.01);
Abstract
An imaging optical unit () serves for imaging an object field () in an object plane () into an image field () in an image plane (). The imaging optical unit () has a plurality of components (Mto M, GI) which guide imaging light (). The imaging optical unit () is embodied as a pupil-obscured system. The imaging optical unit () has at least one mirror (GI) for grazing incidence of the imaging light (). The result is an imaging optical unit having a handleable combination of low imaging aberrations and compact construction.