The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 22, 2016

Filed:

May. 14, 2012
Applicants:

Oliver D. Patterson, Poughkeepsie, NY (US);

Zhigang Song, Hopewell Junction, NY (US);

Inventors:

Oliver D. Patterson, Poughkeepsie, NY (US);

Zhigang Song, Hopewell Junction, NY (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/02 (2006.01); G01R 31/265 (2006.01); G01R 31/317 (2006.01); G01R 31/27 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2653 (2013.01); G01R 31/275 (2013.01); G01R 31/31721 (2013.01);
Abstract

A test structure of a semiconductor wafer includes a series of electrical units connected electrically in series output-to-input in an open loop configuration. The series of electrical units is configured to have alternating output voltages, such that each electrical unit is configured to output a voltage opposite an output voltage of a preceding electrical unit. Each electrical unit is configured to have an output voltage that alternates when an input voltage applied to a first electrical unit in the series of electrical units alternates.


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