The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2016
Filed:
Oct. 13, 2010
Masumi Noguchi, Anjo, JP;
Ken Momono, Chigasaki, JP;
Hagane Irikura, Tsukuba, JP;
Kojima Press Industry Co., Ltd., Toyota-Shi, JP;
ULVAC, INC., Chigasaki-Shi, JP;
Abstract
A technique for forming an organic polymer thin film on a surface of a substrate with high film formation efficiency and excellent reproducibility and stability is provided. When a vacuum deposition polymerization for forming an organic polymer thin film is performed on a surface of a substrate repeatedly, in which a plurality of kinds of monomers evaporated in a plurality of evaporation source containers in vacuum state are introduced into a deposition chamber in a vacuum state and polymerized on a surface of the substrate arranged in the deposition chamber, each of the monomers in a liquid form is present in the evaporation source containers in a constant amount every time, at the beginning of the evaporation operation of monomers.