The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 22, 2016
Filed:
Dec. 12, 2008
Applicants:
Anthonius Martinus Cornelis Petrus DE Jong, Pijnacker, NL;
Hans Jansen, Eindhoven, NL;
Josephus Cornelius Johannes Antonius Vugts, Goirle, NL;
Jacques Cor Johan Van Der Donck, Alphen aan den Rijn, NL;
Teunis Cornelis Van Den Dool, Delft, NL;
Gerrit Oosterhuis, Best, NL;
Inventors:
Anthonius Martinus Cornelis Petrus De Jong, Pijnacker, NL;
Hans Jansen, Eindhoven, NL;
Josephus Cornelius Johannes Antonius Vugts, Goirle, NL;
Jacques Cor Johan Van Der Donck, Alphen aan den Rijn, NL;
Teunis Cornelis Van Den Dool, Delft, NL;
Gerrit Oosterhuis, Best, NL;
Assignee:
ASML NETHERLANDS B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/52 (2006.01); B08B 3/02 (2006.01); B08B 5/02 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
B08B 3/02 (2013.01); B08B 5/02 (2013.01); G03F 7/70341 (2013.01); G03F 7/70925 (2013.01);
Abstract
A method of cleaning a lithography apparatus using an aerosol spray is described. The spray from the aerosol is contained in a space.