The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2016
Filed:
Feb. 23, 2011
Applicants:
Andreas Kurz, Dresden, DE;
Jens Poppe, Radebeul, DE;
Matthias Kessler, Dresden, DE;
Inventors:
Assignee:
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/535 (2006.01); H01L 29/00 (2006.01); H01L 23/525 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5256 (2013.01); H01L 2924/0002 (2013.01); H01L 2924/3011 (2013.01);
Abstract
In sophisticated semiconductor devices, electronic fuses may be provided in the metallization system, wherein a superior two-dimensional configuration of the metal line, for instance as a helix-like configuration, may provide superior thermal conditions in a central line portion, which in turn may result in a more pronounced electromigration effect for a given programming current. Consequently, the size of the electronic fuse, at least in one lateral direction, and also the width of corresponding transistors connected to the electronic fuse, may be reduced.