The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 15, 2016

Filed:

Jun. 07, 2012
Applicants:

Aurelie Marie Andree Brizard, Eindhoven, NL;

Wilhelmus Sebastianus Marcus Maria Ketelaars, Eindhoven, NL;

Sander Frederik Wuister, Eindhoven, NL;

Roelof Koole, Eindhoven, NL;

Emiel Peeters, Eindhoven, NL;

Christianus Martinus Van Heesch, Eindhoven, NL;

Henri Marie Joseph Boots, Best, NL;

Thanh Trung Nguyen, Eindhoven, NL;

Inventors:

Aurelie Marie Andree Brizard, Eindhoven, NL;

Wilhelmus Sebastianus Marcus Maria Ketelaars, Eindhoven, NL;

Sander Frederik Wuister, Eindhoven, NL;

Roelof Koole, Eindhoven, NL;

Emiel Peeters, Eindhoven, NL;

Christianus Martinus Van Heesch, Eindhoven, NL;

Henri Marie Joseph Boots, Best, NL;

Thanh Trung Nguyen, Eindhoven, NL;

Assignee:

ASML NETHERLANDS B.V., Veldhoven, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/11 (2006.01); G03F 7/00 (2006.01); H01L 51/00 (2006.01); C08F 299/02 (2006.01); C08F 299/04 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); C08F 299/02 (2013.01); C08F 299/04 (2013.01); H01L 51/0043 (2013.01);
Abstract

A BCP having first block of first monomer and second block of second monomer, adapted to undergo a transition from disordered state to ordered state at a temperature less than T, further including a bridging moiety having a functional group to provide hydrogen bonding between bridging moieties of adjacent first and second BCP molecules when in the ordered state and at a temperature in excess of a glass transition temperature Tfor the BCP. Composition including BCP comprising first block of first monomer and second block of second monomer, and a crosslinking compound having first and second terminal groups joined by a central moiety and arranged to crosslink second blocks of adjacent first and second BCP molecules by providing non-covalent bonding between the terminal groups and a functional group of the second monomer of the second blocks when the BCP is in the ordered state.


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