The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2016
Filed:
Nov. 04, 2011
Duk Lee, Tokyo, JP;
Hidetoshi Tabata, Tokyo, JP;
Duk Lee, Tokyo, JP;
Hidetoshi Tabata, Tokyo, JP;
Orc Manufacturing Co., LTD., Tokyo, JP;
Abstract
An exposure device can exposes a circuit pattern while information data is suitably changed. An exposure device comprises a first light source () for irradiating a first light including ultraviolet rays, a projection exposure unit () for exposing a circuit pattern drawn on a photomask on a substrate, with the first light, a substrate stage () for mounting the substrate, a housing () for arranging the substrate stage, a second light source () for irradiating a second light including ultraviolet rays, arranged at a position different from the first light source, a spatial light modulation unit () for exposing information data formed electrically using the second light on the substrate, and a spatial optical light modulation unit driving means () for moving the spatial light modulation unit arranged on the housing () in a direction parallel to a moving direction of the substrate stage.