The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2016
Filed:
Dec. 16, 2011
Peter M. Baumgart, San Diego, CA (US);
J. Martin Algots, San Diego, CA (US);
Abhiram Govindaraju, San Diego, CA (US);
Chirag Rajyaguru, San Diego, CA (US);
Peter M. Baumgart, San Diego, CA (US);
J. Martin Algots, San Diego, CA (US);
Abhiram Govindaraju, San Diego, CA (US);
Chirag Rajyaguru, San Diego, CA (US);
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
Steering system for a droplet generator in a EUV system. The steering system permits controlled positioning of a droplet release point of the droplet generator. A movable member holding the droplet generator is coupled to stationary elements of the EUV system through a coupling system having a first subsystem that constrains lateral translation of the movable member, and a second subsystem that controls a relative inclination of the movable member. The first and second subsystems preferably include one or a combination of flexures that permit highly precise and repeatable positioning.