The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2016
Filed:
Jul. 22, 2014
Taiwan Semiconductor Manufacturing Co., Ltd, Hsin-Chu, TW;
Jin-Feng Shiu, Hsinchu, TW;
Rouh-Jier Wang, Hsinchu, TW;
Ching-Jung Hsu, Hsinchu, TW;
Wan-Yu Chen, Zhudong Township, TW;
Han-Ru Hung, Hsinchu, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Abstract
A method and an apparatus for recycling waste sulfuric acid solution are provided. The method includes providing a reaction tank and introducing a waste sulfuric acid (HSO) solution into the reaction tank, and the waste sulfuric acid solution includes hydrogen peroxide (HO). The method also includes supplying a compound containing chlorine into the reaction tank. The method further includes mixing the compound containing chlorine with the waste sulfuric acid solution to promote a chemical reaction that decomposes the hydrogen peroxide (HO).