The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2016
Filed:
Jan. 20, 2011
Hiromasa Hashimoto, Nishishirakawa, JP;
Kouji Morita, Nishishirakawa, JP;
Takashi Aratani, Nishishirakawa, JP;
Hiromi Kishida, Nagano, JP;
Satoru Arakawa, Nagano, JP;
Hiromasa Hashimoto, Nishishirakawa, JP;
Kouji Morita, Nishishirakawa, JP;
Takashi Aratani, Nishishirakawa, JP;
Hiromi Kishida, Nagano, JP;
Satoru Arakawa, Nagano, JP;
SHIN-ETSU HANDOTAI CO., LTD., Tokyo, JP;
FUJIKOSHI MACHINERY CORP., Nagano, JP;
Abstract
A polishing head including, below a polishing head body, a rubber film held by a disk-shaped mid plate and an annular guide ring disposed around the rubber film holding the back surface of the workpiece on a lower face portion of the rubber film. The polishing head also includes a base member that is coupled to a polishing head body through an elastic film and holds the guide ring and the mid plate such that the lower surface of the guide ring does not contact the polishing pad during polishing. The polishing head and polishing apparatus, are operable in both of the rough polishing process and final polishing process, that can stably achieve predetermined high flatness and high polishing stock removal uniformity in polishing of a workpiece and can obtain a workpiece with fewer fine particles having a diameter of 45 nm or more.