The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2016
Filed:
Jun. 15, 2015
Renesas Electronics Corporation, Kawasaki, JP;
Hiroyuki Uchiyama, Tachikawa, JP;
Hiraku Chakihara, Akishima, JP;
Teruhisa Ichise, Ome, JP;
Michimoto Kaminaga, Hitachinaka, JP;
Renesas Electronics Corporation, Kawasaki, JP;
Abstract
A semiconductor substrate includes scribe and product regions, with grooves formed in the scribe region. The grooves are embedded with an insulating film to provide an isolation region, and an active region, including semiconductor elements, is formed in the product region. Dummy patterns are formed in the scribe region, which include a first dummy pattern and second dummy patterns for preventing dishing of the insulating film. The second dummy patterns are surrounded and defined by the isolation region. A target pattern for optical pattern recognition is arranged over the first dummy pattern, and includes a first conductive film. A plane area of the first dummy pattern is larger than a plane area of each of the second dummy patterns, and the first dummy pattern and the second dummy patterns are arranged in order from an edge of the semiconductor substrate toward the product region.