The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2016
Filed:
Jul. 19, 2013
International Business Machines Corporation, Armonk, NY (US);
Shawn A. Adderly, Essex Junction, VT (US);
Jeffrey P. Gambino, Westford, VT (US);
Max L. Lifson, S. Burlington, VT (US);
Matthew D. Moon, Jeffersonville, VT (US);
William J. Murphy, North Ferrisburgh, VT (US);
Timothy D. Sullivan, Underhill, VT (US);
David C. Thomas, Richmond, VT (US);
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Abstract
Substrates (wafers) with uniform backside roughness and methods of manufacture are disclosed. The method includes forming a material on a backside of a wafer. The method further includes patterning the material to expose portions of the backside of the wafer. The method further includes roughening the backside of the wafer through the patterned material to form a uniform roughness.