The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2016
Filed:
Nov. 22, 2010
Yohei Yamazawa, Yamanashi, JP;
Naoki Matsumoto, Miyagai, JP;
Masahide Iwasaki, Hyogo, JP;
Naohiko Okunishi, Yamanashi, JP;
Yohei Yamazawa, Yamanashi, JP;
Naoki Matsumoto, Miyagai, JP;
Masahide Iwasaki, Hyogo, JP;
Naohiko Okunishi, Yamanashi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A parallel resonance frequency can be adjusted in order to stably and securely block different high frequency noises flowing into a line such as a power feed line or a signal line from electric members including a high frequency electrode within a processing chamber. A filter() coaxially accommodates a coil() within a cylindrical outer conductor, and a ring memberis coaxially installed between the coil() and the outer conductor. The ring-shaped membermay be a plate body of a circular ring shape on a plane orthogonal to an axial direction of the outer conductorand made of a conductor such as cupper or aluminum and electrically connected with the outer conductorwhile electrically insulated from the coil().