The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2016
Filed:
Jul. 01, 2011
Setsuo Yamamoto, Ube, JP;
Hiroki Kurisu, Ube, JP;
Naoki Takada, Ube, JP;
Mitsugu Nakagawa, Obu, JP;
Katsushi Tsuge, Obu, JP;
Yukihiro Ishikawa, Obu, JP;
Setsuo Yamamoto, Ube, JP;
Hiroki Kurisu, Ube, JP;
Naoki Takada, Ube, JP;
Mitsugu Nakagawa, Obu, JP;
Katsushi Tsuge, Obu, JP;
Yukihiro Ishikawa, Obu, JP;
YAMAGUCHI UNIVERSITY, Yamaguchi-shi, JP;
MARUNAKA CO., LTD., Obu-shi, JP;
Abstract
Provided are a leakage inspection apparatus and a leakage inspection method for inspecting the flow rate of leakage from a tested body disposed in a tested-body chamber. The leakage inspection apparatus includes liquid supplying and pressurizing meansfor supplying a probe liquid to the inside of the tested-body chamberand pressurizing the probe liquid to a high pressure 0.1 MPa or more, vacuum evacuation means--and a quadrupole mass spectrometer. The tested bodyis evacuated, the probe liquid is supplied to the inside of the tested body and pressurized to 0.1 MPa or more and the concentration of a probe medium leaked from the tested body and evaporated in a vacuum is measured by the quadrupole mass spectrometer, thereby measuring the flow rate of leakage from the tested body. This makes it possible to determine the flow rate of leakage using a liquid as a probe medium and simultaneously possible to perform a pressure tightness inspection at an atmospheric pressure of 0.1 MPa or more, especially at a high pressure ranging from 1 MPa to 1 GPa.