The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2016
Filed:
Nov. 16, 2011
Toshio Suzuki, Kanagawa, JP;
Tomonari Tanaka, Kanagawa, JP;
Kouji Shibayama, Kanagawa, JP;
Masatomo Okamoto, Kanagawa, JP;
Toshio Suzuki, Kanagawa, JP;
Tomonari Tanaka, Kanagawa, JP;
Kouji Shibayama, Kanagawa, JP;
Masatomo Okamoto, Kanagawa, JP;
ULVAC, INC., Kanagawa, JP;
Abstract
Provided is a coupling structure for vacuum exhaust devices each including a pump chamber and a casing that demarcates the pump chamber. The coupling structure includes a first end surface formed on a first side of the casing, and a second end surface formed on the second side of the casing, the second side being the opposite side of the first side. The casing of a first vacuum exhaust device and the casing of a second vacuum exhaust device among a plurality of vacuum exhaust devices are arranged to be directly superposed on each other such that the first end surface provided to the first vacuum exhaust device and the second end surface provided to the second vacuum exhaust device come into contact with each other. By fastening the first end surface and the second end surface, the first vacuum exhaust device and the second vacuum exhaust device are connected to each other such that gas can flow between the casing of the first vacuum exhaust device and the casing of the second vacuum exhaust device.