logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9272315 B1

PDFFull Text
Expired
Date of Patent:
Mar. 01, 2016

Filed:

Oct. 11, 2013

Mechanisms for controlling gas flow in enclosure

Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd, Hsin-Chu, TW;

Inventors:

You-Hua Chou, Hsinchu, TW;

Kuo-Sheng Chuang, Hsinchu, TW;

Yii-Cheng Lin, Hsinchu, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD, Hsin-Chu, TW;

Attorney:

McClure, Qualey & Rodack, LLP

Primary Examiner:

Duane Smith

Assistant Examiner:

Minh-Chau Pham

Int. Cl.
CPC ...
B08B 17/00 (2006.01); B01D 46/44 (2006.01); F24F 3/16 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B08B 17/00 (2013.01); B01D 46/442 (2013.01); B01D 46/446 (2013.01); B01D 2258/0216 (2013.01); B01D 2279/51 (2013.01); F24F 3/1607 (2013.01); H01L 21/67017 (2013.01);
Abstract

Embodiments of mechanisms for controlling a gas flow in an interface module are provided. A method for controlling a gas flow in an enclosure includes providing the enclosure which is capable of containing a substrate. The method also includes providing a gas into the enclosure. The method further includes cleaning the gas. In addition, the method includes actuating the gas to generate the gas flow, and the gas flow passes through the substrate when the substrate is located in the enclosure.

Find Patent Forward Citations

Chou, You-Hua. (2016). Mechanisms for controlling gas flow in enclosure (U.S. Patent No. 9272315). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9272315

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…