The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 23, 2016

Filed:

Sep. 25, 2014
Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

Aurélien Philippe Jean Maclou Botman, Portland, OR (US);

Cameron James Zachreson, Portland, OR (US);

Assignee:

FEI Company, Hillsboro, OR (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); G01N 21/64 (2006.01); G01N 23/225 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
H01J 37/226 (2013.01); G01N 21/64 (2013.01); G01N 21/6458 (2013.01); G01N 23/225 (2013.01); G01N 23/2251 (2013.01); H01J 37/228 (2013.01); H01J 37/26 (2013.01); G01N 2021/6439 (2013.01);
Abstract

Vapor is provided locally at a sample surface to allow fluorescence of the fluorescent markers in a vacuum chamber. For example, a nanocapillary can dispense a liquid near a region of interest, the liquid evaporating to increase the vapor pressure near the fluorescent markers. The increase in vapor pressure at the fluorescent marker is preferably sufficiently great to prevent deactivation or to reactivate the fluorescent marker, while the overall pressure in the vacuum chamber is preferably sufficiently low to permit charged particle beam operation with little or no additional evacuation pumping.


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