The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 23, 2016

Filed:

Aug. 20, 2010
Applicants:

Martin Edelmann, Aalen, DE;

Christian Thomas, Ellwangen, DE;

Inventors:

Martin Edelmann, Aalen, DE;

Christian Thomas, Ellwangen, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/36 (2006.01); H01J 37/22 (2006.01); G01N 23/225 (2006.01); H01J 37/16 (2006.01);
U.S. Cl.
CPC ...
G02B 21/367 (2013.01); G01N 23/2252 (2013.01); H01J 37/228 (2013.01); H01J 37/165 (2013.01);
Abstract

An observation and analysis unit that magnifies an image of a sample and further accomplishes the evaluation and analysis thereof. The observation and analysis unit includes a light-microscopic device designed for the magnified imaging and optical evaluation of the sample and a sample analyzer that analyzes selected regions of the sample. The sample analyzer includes an electron source from which an electron beam can be directed to a region of the sample selected by use of the light-microscopic device. The sample analyzer further includes an X-ray detector designed to detect X-ray radiation generated by the interaction of the electron beam with the sample material. The unit further includes an actuation and evaluation unit that generates control commands for the light-microscopic device and the electron source and spectrally analyzes the X-ray radiation.


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