The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2016
Filed:
Mar. 14, 2013
The Board of Trustees of the Leland Stanford Junior University, Palo Alto, CA (US);
Antonio A. Gellineau, Stanford, CA (US);
Olav Solgaard, Stanford, CA (US);
Karthik Vijayraghavan, Mountain View, CA (US);
Andrew Y J Wang, Mountain View, CA (US);
Manish J. Butte, Stanford, CA (US);
The Board of Trustees of the Leland Stanford Junior University, Palo Alto, CA (US);
Abstract
A high-bandwidth AFM probe having a diffraction grating characterized by a diffraction characteristic that monotonically changes along the length of the diffraction grating is disclosed. AFM probes in accordance with the present invention are capable of high-sensitivity performance over a broad range of operating conditions, such as operating wavelength and measurement media. A method for estimating at least one physical property of a surface based on high-frequency signal components in the output signal from a high-bandwidth AFM probe is also disclosed. The method enables determination of tip-surface interaction forces based on the relationship between a first motion of the base of the AFM probe and a second motion of the tip of the AFM probe.