The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2016
Filed:
Oct. 30, 2013
Applicant:
Solid State System Co., Ltd., Hsinchu, TW;
Inventors:
Cheng-Wei Tsai, Taichung, TW;
Chien-Hsing Lee, Hsinchu County, TW;
Jhyy-Cheng Liou, Hsinchu County, TW;
Assignee:
Solid State System Co., Ltd., Hsinchu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H04R 31/00 (2006.01); H04R 19/00 (2006.01);
U.S. Cl.
CPC ...
H04R 31/00 (2013.01); H04R 19/005 (2013.01); H04R 2201/003 (2013.01);
Abstract
A method to protect an acoustic port of a microelectromechanical system (MEMS) microphone is provided. The method includes: providing the MEMS microphone; and forming a protection film, on the acoustic port of the MEMS microphone. The protection film has a porous region over the acoustic port to receive an acoustic signal but resist at least an intruding material. The protection film can at least endure a processing temperature of solder flow.