The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 16, 2016

Filed:

Oct. 09, 2014
Applicant:

Fuji Electric Co., Ltd., Kawasaki-shi, JP;

Inventor:

Fumikazu Imai, Tsukuba, JP;

Assignee:

FUJI ELECTRIC CO., LTD., Kawasaki-Shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/872 (2006.01); H01L 29/06 (2006.01); H01L 29/16 (2006.01); H01L 21/285 (2006.01); H01L 29/45 (2006.01); H01L 29/47 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66143 (2013.01); H01L 21/2855 (2013.01); H01L 21/28518 (2013.01); H01L 21/28537 (2013.01); H01L 29/0619 (2013.01); H01L 29/1608 (2013.01); H01L 29/45 (2013.01); H01L 29/47 (2013.01); H01L 29/6606 (2013.01); H01L 29/872 (2013.01);
Abstract

A method for manufacturing a semiconductor device includes (a) providing a silicon carbide semiconductor substrate; and (b) forming an electrode structure on the silicon carbide semiconductor substrate by (i) forming a Schottky layer including a metal selected from the group consisting of titanium, tungsten, molybdenum, and chrome on a front surface of the silicon carbide semiconductor substrate; (ii) heating the Schottky layer to form a Schottky electrode which has a Schottky contact with the silicon carbide semiconductor substrate; and (iii) forming a surface electrode comprised of aluminum or aluminum including silicon on a surface of the Schottky electrode, while heating at a temperature range effective for the surface electrode to closely cover any uneven portion of the Schottky electrode and provide a surface electrode having a predetermined reflectance that is equal to or less than 80% so that an improved recognition rate by an automatic wire bonding apparatus is obtained.


Find Patent Forward Citations

Imai, Fumikazu. (2016). Method for manufacturing a semiconductor device (U.S. Patent No. 9263543). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9263543

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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