The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2016
Filed:
Feb. 26, 2014
Applicants:
Eric R. Dickey, Portland, OR (US);
Bryan Larson Danforth, Portland, OR (US);
Inventors:
Eric R. Dickey, Portland, OR (US);
Bryan Larson Danforth, Portland, OR (US);
Assignee:
Lotus Applied Technology, LLC, Hillsboro, OR (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 23/29 (2006.01); H01L 23/00 (2006.01); H01L 51/52 (2006.01);
U.S. Cl.
CPC ...
H01L 23/291 (2013.01); H01L 23/564 (2013.01); H01L 51/5253 (2013.01); H01L 2924/0002 (2013.01);
Abstract
A method of forming a thin barrier film of a mixed metal-silicon-oxide is disclosed. For example, a method of forming an aluminum-silicon-oxide mixture having a refractive index of 1.8 or less comprises exposing a substrate to sequences of a non-hydroxylated silicon-containing precursor, activated oxygen species, and metal-containing precursor until a mixed metal-silicon-oxide film having a thickness of 500 Ångstroms or less is formed on the substrate.