The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 16, 2016

Filed:

Jan. 03, 2014
Applicants:

Chi Wah Cheng, Tsing Yi, HK;

Hoi Shuen Tang, Kwai Chung, HK;

Chun Kit Liu, Tsuen Wan, HK;

Inventors:

Chi Wah Cheng, Tsing Yi, HK;

Hoi Shuen Tang, Kwai Chung, HK;

Chun Kit Liu, Tsuen Wan, HK;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); B26D 5/20 (2006.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01); H01L 21/78 (2006.01); B26D 5/00 (2006.01); B26D 5/06 (2006.01); B26D 1/18 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
H01L 22/20 (2013.01); B26D 1/18 (2013.01); B26D 5/007 (2013.01); B26D 5/06 (2013.01); H01L 21/67092 (2013.01); H01L 21/67259 (2013.01); H01L 21/681 (2013.01); H01L 21/78 (2013.01); Y10T 83/162 (2015.04);
Abstract

Disclosed is a singulation apparatus for cutting a workpiece. The singulation apparatus comprises: i) a processor; ii) at least one chuck device for securing the workpiece to be cut; iii) a cutting device spaced from the at least one chuck device by a separation distance, the cutting device being for cutting the workpiece secured to the at least one chuck device; and iv) an imaging device operable to capture one or more images comprising the cutting device and a reference feature. In particular, the processor is configured to determine a separation distance between the cutting device and the reference feature based on the one or more images as captured by the imaging device, to thereby determine the separation distance between the cutting device and the workpiece as secured to the at least one chuck device.


Find Patent Forward Citations

Loading…