The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2016
Filed:
Sep. 13, 2012
Michikazu Nakamura, Nirasaki, JP;
Masahiko Sugiyama, Nirasaka, JP;
Hajime Furuya, Koshi, JP;
Naoki Akiyama, Nirasaki, JP;
Yosuke Omori, Koshi, JP;
Michikazu Nakamura, Nirasaki, JP;
Masahiko Sugiyama, Nirasaka, JP;
Hajime Furuya, Koshi, JP;
Naoki Akiyama, Nirasaki, JP;
Yosuke Omori, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A joining device includes a first holding unit configured to load and hold the first member on its top surface; a second holding unit disposed above the first holding unit while facing the first holding unit and configured to hold the second member; and a position adjustment mechanism configured to adjust a joining position between the first member held by the first holding unit and the second member held by the second holding unit. The second holding unit is of a circular plate shape, and the position adjustment mechanism includes four position-adjusting cam members disposed at equal intervals along an outer peripheral surface of the second holding unit, and moves the second holding unit in a horizontal direction.