The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2016
Filed:
Sep. 08, 2014
Mapper Lithography Ip B.v., Delft, NL;
Johan Joost Koning, Hillegom, NL;
David Johannes van den Bergen, The Hague, NL;
MAPPER LITHOGRAPHY IP B.V., Delft, NL;
Abstract
The invention relates to a projection lens assembly for directing a beam toward a target. This assembly includes a lens support body () that spans a plane (P), and has a connection region () and a lateral edge (). The lens support body is arranged for insertion into a frame () of a processing unit along an insertion direction (X) parallel with the plane (P). The projection lens assembly includes conduits (-) emanating from the connection region, and a conduit guiding body (-) for accommodating the conduits. The guiding body includes a first guiding portion () for guiding the conduits from the connection region, along the plane to a lateral region (B) beyond the lateral edge. The guiding body also includes a second guiding portion () for guiding the conduits from the lateral region (B) toward a tilted edge () of the conduit guiding body.