The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2016
Filed:
Sep. 14, 2012
Wilfried Clauss, Ulm, DE;
Wilfried Clauss, Ulm, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE (US);
Abstract
An optical arrangement, e.g. projection lens, for EUV lithography, provided with: a first optical element () having a reflective surface () and a first substrate () composed of TiO-doped quartz glass, which has a temperature-dependent coefficient of thermal expansion having a zero crossing at a first zero crossing temperature (T), and a second optical element () having a reflective surface () and a second substrate () composed of TiO-doped quartz glass, which has a temperature-dependent coefficient of thermal expansion having a zero crossing at a second zero crossing temperature (T), which is different from the first. A gradient of the coefficient of thermal expansion of the first substrate () at the first zero crossing temperature (T) and/or a gradient of the coefficient of thermal expansion of the second substrate () at the second zero crossing temperature (T) have/has a negative sign.