The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2016
Filed:
Jun. 17, 2013
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Abstract
Some embodiments of the present disclosure relates to a method and apparatus to achieve a layout that is compatible with a multiple-patterning process. Two or more unit cells are constructed with layouts which satisfy the properties of the multiple-patterning process, and are each decomposed into two or more colors to support the multiple-patterning process. An active layout feature is merged with a dummy wire at a shared boundary between two unit cells. In the event of a short between two active layout features at the shared boundary, an automatic post-layout method can rearrange the layout features in a vicinity of the shared boundary to separate the active layout features to achieve cell functionality while satisfying the multiple-patterning properties.
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