The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2016
Filed:
Jun. 12, 2013
Hitachi, Ltd., Chiyoda-ku, Tokyo, JP;
Hideo Kashima, Tokyo, JP;
Masakazu Sugaya, Tokyo, JP;
Koichi Terada, Tokyo, JP;
Yasutaka Suzuki, Tokyo, JP;
Hisashi Nagano, Tokyo, JP;
Yasuaki Takada, Tokyo, JP;
Yuichiro Hashimoto, Tokyo, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
Sample fine particles attached to an inspection object are identified simply and with high accuracy, and an increase in operation rate and a decrease in device size are achieved. The inspection object is transported into a sampling chamber defined by a pair of side walls and an upper wall enclosing a part of a transport route of a transport unit. The inspection object is sprayed with compressed gas from an air nozzle, the peeled sample fine particles are aspirated into a collector, and the sample fine particles are separated from the aspirated gas for analysis. The air nozzle is disposed on one of the side walls defining the sampling chamber. The collector is disposed under the other side wall as a container independent from the sampling chamber.