The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 16, 2016

Filed:

May. 18, 2010
Applicants:

Junichi Koezuka, Atsugi, JP;

Tetsunori Maruyama, Atsugi, JP;

Takayuki Saito, Atsugi, JP;

Yuki Imoto, Atsugi, JP;

Noriaki Uto, Atsugi, JP;

Yuta Endo, Atsugi, JP;

Hitomi Shionoya, Atsugi, JP;

Takuya Hirohashi, Atsugi, JP;

Shunpei Yamazaki, Setagaya, JP;

Inventors:

Junichi Koezuka, Atsugi, JP;

Tetsunori Maruyama, Atsugi, JP;

Takayuki Saito, Atsugi, JP;

Yuki Imoto, Atsugi, JP;

Noriaki Uto, Atsugi, JP;

Yuta Endo, Atsugi, JP;

Hitomi Shionoya, Atsugi, JP;

Takuya Hirohashi, Atsugi, JP;

Shunpei Yamazaki, Setagaya, JP;

Assignee:

Semiconductor Energy Laboratory Co., Ltd., Atsugi-shi, Kanagawa-ken, JP;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/08 (2006.01); C23C 14/34 (2006.01); C23C 14/06 (2006.01); C23C 14/58 (2006.01); C23C 14/54 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3414 (2013.01); C23C 14/0676 (2013.01); C23C 14/5806 (2013.01); C23C 14/541 (2013.01);
Abstract

An object is to provide a transparent conductive film having favorable transparency and conductivity at low cost. Another object is to reduce the resistivity of a transparent conductive film formed using conductive oxynitride including zinc and aluminum. Another object is to provide a transparent conductive film that is formed using conductive oxynitride including zinc and aluminum. When aluminum and nitrogen are made to be included in a transparent conductive film formed using oxide including zinc to form a transparent conductive film that is formed using conductive oxynitride including zinc and aluminum, the transparent conductive film can have reduced resistivity. Heat treatment after the formation of the transparent conductive film that is formed using conductive oxynitride including zinc and aluminum enables reduction in resistivity of the transparent conductive film.


Find Patent Forward Citations

Koezuka, Junichi. (2016). Light-transmitting conductive film, display device, electronic device, and manufacturing method of light-transmitting conductive film (U.S. Patent No. 9260779). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9260779

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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