The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2016
Filed:
Sep. 15, 2011
James W. Adkisson, Jericho, VT (US);
Panglijen Candra, Essex Junction, VT (US);
Kevin N. Ogg, Essex Junction, VT (US);
Anthony K. Stamper, Williston, VT (US);
James W. Adkisson, Jericho, VT (US);
Panglijen Candra, Essex Junction, VT (US);
Kevin N. Ogg, Essex Junction, VT (US);
Anthony K. Stamper, Williston, VT (US);
GlobalFoundries, Inc., Grand Cayman, KY (US);
Abstract
A MIM capacitor includes a dielectric cap that enhances performance and reduces damage to MIM insulators during manufacture. A cavity is formed in an insulative substrate, such as a back end of line dielectric layer, and a first metal layer and an insulator layer are conformally deposited. A second metal layer may be deposited conformally and/or to fill a remaining portion of the cavity. The dielectric cap may be an extra layer of insulative material deposited at ends of the insulator at an opening of the cavity and may also be formed as part of the insulator layer.