The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2016
Filed:
Dec. 27, 2012
Hao-han Hsu, Portland, OR (US);
Rashed Mahameed, Beaverton, OR (US);
Mohamed A. Abdelmoneum, Portland, OR (US);
Dong-ho Han, Beaverton, OR (US);
Hao-Han Hsu, Portland, OR (US);
Rashed Mahameed, Beaverton, OR (US);
Mohamed A. Abdelmoneum, Portland, OR (US);
Dong-Ho Han, Beaverton, OR (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
Methods and systems may provide for a hybrid RF MEMS component design including an electrostatic actuation and a piezoelectric actuation. In one example, the method may include applying a first voltage to generate a first piezoelectric force to reduce a first gap between a cantilever and an actuation electrode, and applying a second voltage to generate an electrostatic force to create contact between the cantilever and a transmission electrode.