The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2016
Filed:
Jul. 11, 2013
Applicant:
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Inventors:
Daijiro Mori, Kawasaki, JP;
Takayuki Haraguchi, Kawasaki, JP;
Assignee:
TOKYO OHKA KOGYO CO., LTD., Kawasaki-Shi, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/42 (2006.01); H01L 21/32 (2006.01); H01L 21/306 (2006.01); H01L 21/321 (2006.01); H01L 21/02 (2006.01); H01L 21/3065 (2006.01); H01L 21/311 (2006.01); C11D 7/06 (2006.01); C11D 7/28 (2006.01); C11D 7/32 (2006.01); C11D 7/50 (2006.01); C11D 11/00 (2006.01); H01L 21/768 (2006.01); B81C 1/00 (2006.01); C11D 7/26 (2006.01); C11D 7/34 (2006.01);
U.S. Cl.
CPC ...
G03F 7/426 (2013.01); B81C 1/00849 (2013.01); C11D 7/06 (2013.01); C11D 7/28 (2013.01); C11D 7/3209 (2013.01); C11D 7/5022 (2013.01); C11D 11/0047 (2013.01); G03F 7/425 (2013.01); H01L 21/02057 (2013.01); H01L 21/30604 (2013.01); H01L 21/30655 (2013.01); H01L 21/31133 (2013.01); H01L 21/3212 (2013.01); H01L 21/76898 (2013.01); C11D 7/261 (2013.01); C11D 7/3281 (2013.01); C11D 7/34 (2013.01);
Abstract
A nonaqueous cleaning liquid comprising a fluoroalkanol, a quaternary ammonium hydroxide, and an organic solvent. Compounds represented by formulae (1) and (2). Fluoroalkanol compounds include (1) H(CF)CH—OH and (2) F(CF)(CH)—OH In which a and b are each an integer of from 2 to 6, and c is an integer of 1 or 2.