The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 02, 2016

Filed:

Apr. 28, 2014
Applicants:

Tsinghua University, Beijing, CN;

Hon Hai Precision Industry Co., Ltd., New Taipei, TW;

Inventors:

Zhen-Dong Zhu, Beijing, CN;

Qun-Qing Li, Beijing, CN;

Ben-Feng Bai, Beijing, CN;

Shou-Shan Fan, Beijing, CN;

Assignees:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/311 (2006.01); G02B 5/18 (2006.01);
U.S. Cl.
CPC ...
G02B 5/1809 (2013.01); G02B 5/1857 (2013.01); G02B 5/1861 (2013.01);
Abstract

A method for making a hollow-structure metal grating is provided. The method includes providing a substrate, forming a patterned mask layer on a surface of the substrate, applying a metal layer with a thickness greater than 10 nanometers on the patterned mask layer, and removing the patterned mask layer by a washing method using organic solvent. The patterned mask layer includes a plurality of first protruding structures and a plurality of first cavities arranged in intervals.


Find Patent Forward Citations

Zhu, Zhen-Dong. (2016). Method of manufacturing hollow-structure metal grating (U.S. Patent No. 9250369). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9250369

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