The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2016
Filed:
Apr. 23, 2012
Applicants:
Wei-tse Hsu, Taoyuan County, TW;
Tung-po Hsieh, Taipei, TW;
Song-yeu Tsai, Taipei, TW;
Inventors:
Assignee:
Industrial Technology Research Institute, Hsinchu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05C 3/02 (2006.01); B05C 3/04 (2006.01); B05B 1/00 (2006.01); C23C 18/12 (2006.01);
U.S. Cl.
CPC ...
C23C 18/12 (2013.01); B05C 3/02 (2013.01); C23C 18/1204 (2013.01); C23C 18/125 (2013.01); C23C 18/1283 (2013.01); C23C 18/1295 (2013.01);
Abstract
A chemical bath deposition (CBD) apparatus includes a first cap, a second cap, and a solution input/output device. The second cap is arranged corresponding to the first cap so as to form a deposition space. The solution input/output device is located in the first cap so as to feed a solution into/out of the deposition space. The position of the solution input/output device is fixed, or the solution input/output device is movable in the deposition space.