The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2016
Filed:
Dec. 19, 2013
Applicant:
First Solar, Inc, Perrysburg, OH (US);
Inventors:
Benyamin Buller, Sylvania, OH (US);
Douglas Dauson, Perrysburg, OH (US);
David Hwang, Perrysburg, OH (US);
Scott Mills, Perrysburg, OH (US);
Dale Roberts, Holland, MI (US);
Rui Shao, Sylvania, OH (US);
Zhibo Zhao, Novi, MI (US);
Assignee:
FIRST SOLAR, INC., Perrysburg, OH (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/66 (2006.01); G01B 11/06 (2006.01); H01L 31/0224 (2006.01); H01L 31/18 (2006.01); G01R 31/40 (2014.01);
U.S. Cl.
CPC ...
H01L 22/12 (2013.01); G01B 11/0625 (2013.01); H01L 31/022425 (2013.01); H01L 31/022466 (2013.01); H01L 31/1884 (2013.01); H02S 50/00 (2013.01); Y02E 10/50 (2013.01);
Abstract
A method and system for real-time, in-line calculations of opto-electronic properties and thickness of the layers of multi-layered transparent conductive oxide stacks of photovoltaic devices is provided. The method and system include taking measurements of each layer of the stack during deposition thereof. The measurements are then used to calculate the opto-electronic properties and thicknesses of the layers in real-time.