The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2016
Filed:
Feb. 24, 2012
Amar B. Kamdar, Burnaby, CA;
David Malcolm Camm, Vancouver, CA;
Mladen Bumbulovic, Vancouver, CA;
Peter Lembesis, Langley, CA;
Amar B. Kamdar, Burnaby, CA;
David Malcolm Camm, Vancouver, CA;
Mladen Bumbulovic, Vancouver, CA;
Peter Lembesis, Langley, CA;
Mattson Technology, Inc., Fremont, CA (US);
Abstract
An apparatus for generating electromagnetic radiation includes an envelope, a vortex generator configured to generate a vortexing flow of liquid along an inside surface of the envelope, first and second electrodes within the envelope configured to generate a plasma arc therebetween, and an insulative housing associated surrounding at least a portion of an electrical connection to one of the electrodes. The apparatus further includes a shielding system configured to block electromagnetic radiation emitted by the arc to prevent the electromagnetic radiation from striking all inner surfaces of the insulative housing. The apparatus further includes a cooling system configured to cool the shielding system.