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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9245710 B1

PDFFull Text
Date of Patent:
Jan. 26, 2016

Filed:

Feb. 20, 2013

Charged particle beam device

Applicant:

Hitachi High-technologies Corporation, Tokyo, JP;

Inventors:

Kazuhiro Gunji, Tokyo, JP;

Yasushi Ebizuka, Tokyo, JP;

Yuta Asaga, Tokyo, JP;

Assignee:

HITACHI HIGH-TECHNOLOGIES CORPORATION, Tokyo, JP;

Attorney:

McDermott Will & Emery LLP

Primary Examiner:

David A Vanore

Int. Cl.
CPC ...
H01J 37/18 (2006.01); H01J 37/16 (2006.01); H01J 37/20 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/18 (2013.01); H01J 37/185 (2013.01); H01J 37/28 (2013.01); H01J 2237/18 (2013.01); H01J 2237/204 (2013.01); H01J 2237/28 (2013.01); H01J 2237/2801 (2013.01);
Abstract

A charged particle beam device that appropriately maintains a throughput of the device for each of specimens different in a gas emission volume from each other is provided. A scanning electron microscope includes an electron source, a specimen stage, a specimen chamber, and an exchange chamber, and further includes a vacuum gauge that measures an internal pressure of the exchange chamber, a time counting unit that counts time taken when a measurement result by the vacuum gauge has reached a predetermined degree of vacuum, and an integral control unit that performs comparative calculation and determination based on a measurement result by the time counting unit and integral control based on a process flow. And, the integral control unit controls changing of a content of a subsequent process based on a shift of the degree of vacuum of the exchange chamber.

Find Patent Forward Citations

Gunji, Kazuhiro. (2016). Charged particle beam device (U.S. Patent No. 9245710). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9245710

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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