The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2016
Filed:
May. 30, 2014
Applicant:
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Inventors:
Yoshitaka Komuro, Kawasaki, JP;
Takaaki Kaiho, Kawasaki, JP;
Toshiaki Hato, Kawasaki, JP;
Akiya Kawaue, Kawasaki, JP;
Junichi Tsuchiya, Kawasaki, JP;
Yoshiyuki Utsumi, Kawasaki, JP;
Assignee:
TOKYO OHKA KOGYO CO., LTD., Kawasaki-Shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/027 (2006.01); G03F 7/20 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01); C07C 309/65 (2006.01); C07C 381/12 (2006.01);
U.S. Cl.
CPC ...
G03F 7/027 (2013.01); C07C 309/65 (2013.01); C07C 381/12 (2013.01); G03F 7/0045 (2013.01); G03F 7/038 (2013.01); G03F 7/0397 (2013.01); G03F 7/20 (2013.01);
Abstract
A resist composition comprising a compound (m0) (wherein Rbrepresents an electron withdrawing group; Rband Rbeach independently represents an aryl group, an alkyl group or an alkenyl group, provided that Rband Rbmay be mutually bonded to form a ring with the sulfur atom; and X0represents a monovalent counteranion).