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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9236437 B1

PDFFull Text
Date of Patent:
Jan. 12, 2016

Filed:

Feb. 20, 2014

Method for creating self-aligned transistor contacts

Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Mark A. Zaleski, Galway, NY (US);

Andy Chih-Hung Wei, Queensbury, NY (US);

Jason E. Stephens, Cohoes, NY (US);

Tuhin Guha Neogi, Clifton Park, NY (US);

Guillaume Bouche, Albany, NY (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorney:

Williams Morgan, P.C.

Primary Examiner:

Thanhha Pham

Int. Cl.
CPC ...
H01L 29/417 (2006.01); H01L 29/51 (2006.01); H01L 29/66 (2006.01); H01L 27/088 (2006.01); H01L 29/78 (2006.01); H01L 21/8234 (2006.01);
U.S. Cl.
CPC ...
H01L 29/41758 (2013.01); H01L 21/8234 (2013.01); H01L 27/088 (2013.01); H01L 29/518 (2013.01); H01L 29/66348 (2013.01); H01L 29/66484 (2013.01); H01L 29/66613 (2013.01); H01L 29/66621 (2013.01); H01L 29/66727 (2013.01); H01L 29/66795 (2013.01); H01L 29/785 (2013.01);
Abstract

Embodiments of the present invention provide improved methods of contact formation. A self aligned contact scheme with reduced lithography requirements is disclosed. This reduces the risk of shorts between source/drains and gates, while providing improved circuit density. Cavities are formed adjacent to the gates, and a fill metal is deposited in the cavities to form contact strips. A patterning mask is then used to form smaller contacts by performing a partial metal recess of the contact strips.

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