The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 12, 2016

Filed:

Oct. 06, 2014
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Rajesh Baskaran, Dracut, MA (US);

Robert W. Batz, Jr., Kalispell, MT (US);

Bioh Kim, Milford, CT (US);

Thomas L. Ritzdorf, Bigfork, MT (US);

John Lee Klocke, Kalispell, MT (US);

Kyle M. Hanson, Kalispell, MT (US);

Assignee:

APPLIED Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 17/00 (2006.01); C25D 7/12 (2006.01); C25D 5/02 (2006.01); C25D 3/38 (2006.01); C25F 3/02 (2006.01); H01L 21/288 (2006.01); H01L 21/768 (2006.01); C25D 3/12 (2006.01); C25D 3/20 (2006.01); C25D 3/30 (2006.01); C25D 3/34 (2006.01); C25D 3/46 (2006.01); C25D 3/54 (2006.01); C25D 21/12 (2006.01); H05K 3/42 (2006.01);
U.S. Cl.
CPC ...
C25D 5/028 (2013.01); C25D 3/12 (2013.01); C25D 3/20 (2013.01); C25D 3/30 (2013.01); C25D 3/34 (2013.01); C25D 3/38 (2013.01); C25D 3/46 (2013.01); C25D 3/54 (2013.01); C25D 5/022 (2013.01); C25D 17/001 (2013.01); C25D 17/002 (2013.01); C25D 21/12 (2013.01); C25F 3/02 (2013.01); H01L 21/2885 (2013.01); H01L 21/76846 (2013.01); H01L 21/76868 (2013.01); H01L 21/76873 (2013.01); H05K 3/423 (2013.01);
Abstract

Processes and systems for electrolytically processing a microfeature workpiece with a first processing fluid and a counter electrode are described. Microfeature workpieces are electrolytically processed using a first processing fluid, a counter electrode, a second processing fluid, and an anion permeable barrier layer. The anion permeable barrier layer separates the first processing fluid from the second processing fluid while allowing certain anionic species to transfer between the two fluids.


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