The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9231048 B1

PDF
Full Text
Expired
Date of Patent:
Jan. 05, 2016

Filed:

Jun. 28, 2013
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Inventors:

Chi-Di An, Hsin-Chu, TW;

Chien-Hung Chen, Taipei, TW;

Yu-Juan Chan, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 49/02 (2006.01); H01L 29/66 (2006.01); H01L 29/94 (2006.01); H01L 23/522 (2006.01); H01L 27/02 (2006.01);
U.S. Cl.
CPC ...
H01L 28/86 (2013.01); H01L 23/5223 (2013.01); H01L 28/60 (2013.01); H01L 29/66181 (2013.01); H01L 29/94 (2013.01); H01L 27/0207 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A device comprises a substrate having at least one active region, an insulating layer above the substrate, and an electrode in a gate electrode layer above the insulating layer, forming a metal-oxide-semiconductor (MOS) capacitor. A first contact layer is provided on the electrode, having an elongated first pattern extending in a first direction parallel to the electrode. A contact structure contacts the substrate. The contact structure has an elongated second pattern extending parallel to the first pattern. A dielectric material is provided between the first and second patterns, so that the first and second patterns and dielectric material form a side-wall capacitor connected in parallel to the MOS capacitor.


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