The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2016
Filed:
Apr. 04, 2014
Nuflare Technology, Inc., Yokohama, JP;
Yoshitaka Yasui, Kanagawa, JP;
Ikunao Isomura, Kanagawa, JP;
NuFlare Technology, Inc., Yokohama, JP;
Abstract
An inspection method and inspection apparatus comprising, acquiring an optical image of a pattern formed in a sample, generating a reference image corresponding to the optical image, comparing the optical image and the reference image using a die-to-database method to detect a defect in the optical image and storing information on the defect; regenerating a reference image by reflecting a dimension distribution of a pattern in the surface of the sample on the reference image, and re-comparing an optical image in which a defect is detected by the comparison using the die-to-database method and the regenerated reference image which corresponds to the optical image using the die-to-database method to detect the defect in the optical image in which the defect has been detected, storing information on the defect when the defect is redetected, and determining that the optical image has no defect.