The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2015
Filed:
May. 01, 2014
Tsmc Solid State Lighting Ltd., Hsinchu, TW;
Chyi Shyuan Chern, Taipei, TW;
Hsin-Hsien Wu, Hsinchu, TW;
Chun-Lin Chang, Jhubei, TW;
Hsing-Kuo Hsia, Jhubei, TW;
Hung-Yi Kuo, Taipei, TW;
TSMC SOLID STATE LIGHTING LTD., Hsinchu, TW;
Abstract
A method includes forming an opening in a substrate, and the opening completely extends through the substrate. A recast material is formed on sidewalls of the substrate exposed by the opening. A first chemical is applied in the opening to remove the recast material, wherein a residue of the first chemical remains on portions of the sidewalls after the applying of the first chemical. Moreover, A second chemical is applied in the opening to remove the residue of the first chemical, and the second chemical is different from the first chemical.