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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9223228 B1

PDFFull Text
Date of Patent:
Dec. 29, 2015

Filed:

Sep. 29, 2014

Method and apparatus for forming pattern

Applicant:

Hitachi High-technologies Corporation, Tokyo, JP;

Inventors:

Nobuyuki Ushifusa, Yokohama, JP;

Naohito Uemura, Tokyo, JP;

Shigeru Suzuki, Honjo, JP;

Assignee:

HITACHI HIGH-TECHNOLOGIES CORPORATION, Tokyo, JP;

Attorney:

Baker Botts L.L.P.

Primary Examiner:

Mark A Laurenzi

Int. Cl.
CPC ...
H01L 21/20 (2006.01); G03F 7/20 (2006.01); B05D 1/32 (2006.01); B05C 3/20 (2006.01); H01L 31/18 (2006.01); B41F 15/40 (2006.01); B41F 15/42 (2006.01); G03F 7/12 (2006.01); B41M 1/12 (2006.01); H01L 31/0224 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70691 (2013.01); B05C 3/20 (2013.01); B05D 1/32 (2013.01); B41F 15/40 (2013.01); B41F 15/42 (2013.01); B41M 1/12 (2013.01); G03F 7/12 (2013.01); H01L 31/022425 (2013.01); H01L 31/18 (2013.01); Y02E 10/50 (2013.01);
Abstract

There is provided a pattern forming apparatus which transfers a paste to a predetermined position of a pattern forming object fixed to a table through a pattern forming mask having opening portions at predetermined positions using a discharge mechanism part. To realize a pattern forming which allows the stable forming of a fine pattern with high accuracy and allows the paste to be surely filled into fine through holes, a corner portion of a distal end of the discharge mechanism part in contact with the pattern forming mask is formed into a concave shape, and a surface of the distal end portion of the discharge mechanism part including the concave shaped portion is covered with a film having liquid repellency so that the rolling of the paste is accelerated in a region formed by the concave shaped portion to form a fine pattern with high accuracy.

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