The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2015
Filed:
Sep. 28, 2011
Applicant:
Holger Seitz, Jena, DE;
Inventor:
Holger Seitz, Jena, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04N 7/18 (2006.01); G01N 21/956 (2006.01); G01B 11/02 (2006.01); G03F 1/84 (2012.01);
U.S. Cl.
CPC ...
G01N 21/95607 (2013.01); G01B 11/02 (2013.01); G03F 1/84 (2013.01); G01N 2021/95676 (2013.01);
Abstract
A mask inspection microscope is provided for characterizing a mask having a feature. The mask inspection microscope is configured to generate an aerial image of at least one segment of the feature of the mask, acquire a spatially resolved intensity distribution of the aerial image, and determine a total intensity from the intensities of at least one region of the aerial image.