The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2015
Filed:
Mar. 06, 2013
Mei Sun, Los Altos, CA (US);
Earl Jensen, Santa Clara, CA (US);
Farhat Quli, Union City, CA (US);
Stephen Sharratt, Mountain View, CA (US);
Mei Sun, Los Altos, CA (US);
Earl Jensen, Santa Clara, CA (US);
Farhat Quli, Union City, CA (US);
Stephen Sharratt, Mountain View, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
Aspects of the present disclosure disclose a component module in a process condition measuring device comprises a support for supporting a component, one or more legs configured to suspend the support in a spaced-apart relationship with respect to a substrate. An electrically conductive or low-resistivity semiconductor enclosure is configured to enclose the component, the support and the legs between the substrate and the enclosure. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.