The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2015
Filed:
Mar. 18, 2013
Applicant:
Industrial Technology Research Institute, Hsinchu, TW;
Inventors:
Jau-Chyn Huang, Hsinchu, TW;
Kong-Wei Cheng, Hsinchu, TW;
Wen-Sheng Chang, Hsinchu, TW;
Tai-Chou Lee, Hsinchu, TW;
Ching-Chen Wu, Hsinchu, TW;
Assignee:
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, Hsinchu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05C 3/05 (2006.01); C23C 18/14 (2006.01); H01L 21/02 (2006.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
B05C 3/05 (2013.01); C23C 18/14 (2013.01); H01L 21/02568 (2013.01); H01L 21/02628 (2013.01); H01L 31/18 (2013.01);
Abstract
A method and apparatus of growing a thin film are provided. The method comprises at least (a) providing a number of substrates; (b) cleaning the substrates; and (c) placing the substrates into a reaction liquid; (d) vibrating the reaction liquid by ultrasonic waves such that a thin film is grown on the substrates evenly.