The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 22, 2015

Filed:

Jul. 05, 2013
Applicant:

Infineon Technologies Dresden Gmbh, Dresden, DE;

Inventors:

Anton Mauder, Kolbermoor, DE;

Katarzyna Kowalik-Seidl, Munich, DE;

Rolf Weis, Dresden, DE;

Uwe Wahl, Munich, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7827 (2013.01);
Abstract

A semiconductor device includes transistor cells with vertical channels perpendicular to a first surface of a semiconductor portion. A buried compensation structure in the semiconductor portion between the transistor cells and a second surface of the semiconductor portion parallel to the first surface includes first areas and second areas. The first and second areas are alternatingly arranged along a lateral direction parallel to the first surface. A contiguous impurity layer of a first conductivity type separates the transistor cells from the buried compensation structure.


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