The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 22, 2015

Filed:

Aug. 24, 2011
Applicants:

Hubert Moriceau, Saint Egreve, FR;

Maxime Argoud, Lyons, FR;

Christophe Morales, Saint Pierre de Message, FR;

Marc Zussy, Saint Egreve, FR;

Inventors:

Hubert Moriceau, Saint Egreve, FR;

Maxime Argoud, Lyons, FR;

Christophe Morales, Saint Pierre de Message, FR;

Marc Zussy, Saint Egreve, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 29/06 (2006.01); H01L 21/762 (2006.01); H01L 21/20 (2006.01); H01L 21/683 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76251 (2013.01); H01L 21/2007 (2013.01); H01L 21/762 (2013.01); H01L 21/76224 (2013.01); H01L 21/68 (2013.01); H01L 21/6835 (2013.01);
Abstract

A method for obtaining a film made out of a first material on a polymer support, said method comprising bonding a first wafer to a second wafer, thereby defining a bonding interface between said first wafer and said second wafer, at least one of said first and second wafers comprising a layer of said first material situated in proximity to said bonding interface, in said first wafer, hollowing out a cavity, said cavity comprising a bottom parallel to said bonding interface that defines, in said first wafer, a bottom zone at a controlled distance relative to said second wafer, forming, in said cavity, a polymer layer on a thickness controlled from a bottom thereof to obtain a combined wafer portion, said combined wafer portion comprising a bottom zone formed by said polymer layer on said bottom and a peripheral zone, and eliminating said second wafer on a major portion of a thickness thereof, thereby releasing, beneath said polymer layer, a film comprising said layer of said first material.


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